• manufacturing, a low-κ is a material with a small relative dielectric constant (κ, kappa) relative to silicon dioxide. Low-κ dielectric material implementation...
    7 KB (857 words) - 19:01, 8 January 2024
  • term high-κ dielectric refers to a material with a high dielectric constant (κ, kappa), as compared to silicon dioxide. High-κ dielectrics are used in...
    12 KB (1,397 words) - 17:17, 4 September 2024
  • Thumbnail for Relative permittivity
    function Low-κ dielectric Loss tangent Permittivity Refractive index Permeability (electromagnetism) Hector, L. G.; Schultz, H. L. (1936). "The Dielectric Constant...
    16 KB (2,033 words) - 11:05, 16 October 2024
  • Thumbnail for Dielectric
    Dielectric absorption Dielectric losses Dielectric strength Dielectric spectroscopy EIA Class 1 dielectric EIA Class 2 dielectric High-κ dielectric Low-κ...
    37 KB (4,758 words) - 12:27, 4 October 2024
  • less than 0.25-square-micrometre using immersion lithography and low-κ dielectrics. In 2006, Samsung developed a 40 nm process. The successors to 45 nm...
    14 KB (1,395 words) - 00:52, 28 February 2024
  • can be metal or dielectric. Silicon based masks such as silicon dioxide or silicon carbide are usually used for etching low-κ dielectrics. However, SiOCH...
    3 KB (356 words) - 08:29, 16 July 2022
  • Thumbnail for Permittivity
    polarizability of a dielectric material. A material with high permittivity polarizes more in response to an applied electric field than a material with low permittivity...
    34 KB (4,420 words) - 22:23, 14 November 2024
  • Thumbnail for Benzocyclobutene
    processing. Applications include wafer bonding, optical interconnects, low-κ dielectrics, or even intracortical neural implants. Benzocyclobutene is a strained...
    4 KB (210 words) - 19:05, 8 March 2022
  • Thumbnail for Integrated circuit
    interconnects where copper wiring replaces aluminum for interconnects. Low-κ dielectric insulators. Silicon on insulator (SOI). Strained silicon in a process...
    86 KB (9,201 words) - 21:38, 21 November 2024
  • Thumbnail for Chemical vapor deposition
    fluorocarbons, filaments, tungsten, titanium nitride and various high-κ dielectrics. The term chemical vapour deposition was coined in 1960 by John M. Blocher...
    41 KB (4,938 words) - 07:57, 6 June 2024
  • Thumbnail for Processor power dissipation
    metal interconnect between two sections of a single integrated chip; low-κ dielectric, etc. Power gating techniques such as clock gating and globally asynchronous...
    16 KB (2,009 words) - 04:53, 11 April 2024
  • 2020 Breakthrough of the Year award by the magazine Physics World. Low-κ dielectric Silicon on insulator Silicon-tin Application of silicon-germanium thermoelectrics...
    12 KB (1,357 words) - 10:25, 28 December 2023
  • introduce elongated, oriented pores into a low-κ dielectric to further reduce the effective κ value of the dielectric. Palladium supported on vertically aligned...
    54 KB (7,334 words) - 22:07, 2 November 2024
  • Thumbnail for MOSFET
    the increase in power consumption due to gate current leakage, a high-κ dielectric is used instead of silicon dioxide for the gate insulator, while polysilicon...
    99 KB (11,953 words) - 23:36, 19 October 2024
  • Thumbnail for Zirconium dioxide
    Zirconium dioxide (category High-κ dielectrics)
    zirconate titanate (PZT), which is a high-κ dielectric, which is found in myriad components. The very low thermal conductivity of cubic phase of zirconia...
    21 KB (2,070 words) - 17:05, 25 October 2024
  • gaps, the use of air-filled or vacuum pockets as a replacement for low-κ dielectrics in integrated circuits Mid-Atlantic gap, a geographic area not covered...
    1 KB (174 words) - 21:22, 10 July 2023
  • with low-κ dielectrics for lower C (capacitance). Cu was selected as the replacement for Al, because it has the lowest electronic resistance among low-cost...
    11 KB (1,557 words) - 12:56, 4 November 2024
  • chemical properties. FSG has a small relative dielectric constant (low-κ dielectric) and is used in between metal copper interconnect layers during silicon...
    3 KB (326 words) - 18:41, 19 July 2023
  • belongs to a general class of similar techniques that replaces solid low-κ dielectrics with air-filled or vacuum pockets. By insulating copper interconnects...
    3 KB (336 words) - 20:13, 25 August 2024
  • Thumbnail for PA-8000
    insulator (SOI) CMOS process with seven levels of copper interconnect and low-κ dielectric. The PA-8700+ was a further development of the PA-8700 introduced in...
    22 KB (3,114 words) - 06:32, 24 November 2024
  • will vary depending on the dielectric material and the frequency of the electrical signals. In low dielectric constant (low-κ), temperature compensating...
    5 KB (628 words) - 05:22, 23 February 2024
  • Efforts to minimize leakage include the use of strained silicon, high-κ dielectrics, and/or stronger dopant levels in the semiconductor. Leakage reduction...
    8 KB (999 words) - 15:04, 28 September 2023
  • Thumbnail for Refractive index
    light), dielectric loss may increase absorption significantly, reducing the material's transparency to these frequencies. The real n, and imaginary κ, parts...
    78 KB (8,750 words) - 07:12, 25 November 2024
  • Thumbnail for Semiconductor device fabrication
    constant materials, also called low-κ dielectrics, are being used (such as silicon oxycarbide), typically providing dielectric constants around 2.7 (compared...
    110 KB (11,554 words) - 07:38, 21 November 2024
  • dielectric [ILD]), should have a dielectric constant that is as close to 1 as possible. A class of such materials, Low-κ dielectrics, were introduced during the...
    11 KB (1,470 words) - 22:43, 5 November 2023
  • {\displaystyle \lambda } , or κ {\displaystyle \kappa } and is measured in W·m−1·K−1. Heat transfer occurs at a lower rate in materials of low thermal conductivity...
    63 KB (8,360 words) - 20:48, 18 October 2024
  • (high-performance) to 50 nm (low-power) Core voltage: 1.0 V 11 Cu interconnect layers using nano-clustering silica as ultralow κ dielectric (κ=2.25) Metal 1 pitch:...
    8 KB (794 words) - 03:16, 12 August 2024
  • Thumbnail for Tantalum pentoxide
    Tantalum pentoxide (category High-κ dielectrics)
    X; et al. (2004). "A Novel MONOS-Type Nonvolatile Memory Using High-κ Dielectrics for Improved Data Retention and Programming Speed". IEEE Transactions...
    24 KB (2,450 words) - 17:45, 16 August 2024
  • the fields is occupied by a solid dielectric. With only part of the electromagnetic field effected by the dielectric, there is less reduction of the wave...
    44 KB (5,298 words) - 19:54, 19 June 2024
  • Thumbnail for Metamaterial
    semi-conductor crystals. EBGs have the goal of creating high quality, low loss, periodic, dielectric structures. An EBG affects photons in the same way semiconductor...
    93 KB (10,025 words) - 20:55, 10 October 2024