Silyl ethers are a group of chemical compounds which contain a silicon atom covalently bonded to an alkoxy group. The general structure is R1R2R3Si−O−R4...

+ H2O → 2 HCl + O[Si(CH3)3]2 It also results from the hydrolysis of silylethers and other silyl-protected functional groups. HMDSO can be converted back...