SMIF (Standard Mechanical Interface) is a wafer carrier used in semiconductor wafer fabrication and cleanroom environments. The isolation technology was...
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protection (or "Mask work") Mask inspection Nanochannel glass materials SMIF interface Stepping level "Reticle Manufacturing". KLA. Retrieved 2024-01-05. Diaz...
20 KB (2,323 words) - 15:35, 24 August 2024
The size of the wafers and their comparative lack of rigidity meant that SMIF pods were not a viable form factor. FOUP standards were developed by SEMI...
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on Item Missingness". Survey Methods: Insights from the Field (SMIF). doi:10.13094/SMIF-2013-00006. ISSN 2296-4754. Pan, Yuling; Sha, Mandy (2019-07-09)...
29 KB (3,526 words) - 20:43, 12 July 2024
into lots, which are represented by a FOUP, SMIF or a wafer cassette, which are wafer carriers. FOUPs and SMIFs can be transported in the fab between machines...
109 KB (11,548 words) - 07:14, 16 October 2024